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Vanderbilt Institute of Nanoscale Science and Engineering (VINSE)

Overview of Services

VINSE provides access and training on state-of-the-art fabrication and characterization equipment. Full-time staff provide training, process assistance and tool troubleshooting.  Our new facilities include a cleanroom, analytical support core and advanced imaging suite. The cleanroom provides cutting-edge nanofabrication tools for the development of materials and integrated devices as well as microfluidic and nano-photonic systems. An analytical laboratory conveniently located adjacent to the cleanroom contains a comprehensive range of characterization tools. The imaging suite hosts a number of advanced imaging platforms.


New user access request - click here

All VINSE users are required to complete two Vanderbilt's Environmental Health and Safety modules: Chemical Waste Training for Labs & Chemical and Physical Safety in the Lab.
Additional separate orientation sessions are required for access to the cleanroom and the analytical lab.

Services Offered

  • Physical and chemical vapor deposition
  • Focused ion beam
  • Reactive ion etching and plasma treatment
  • Wet chemical etching and cleaning
  • Photolithography
  • Electron beam lithography
  • Soft lithography
  • Photomask design and fabrication
  • Thermal and oxygen sensitive processing
  • Printing and assembly
  • Device packaging
  • Optical microscopy
  • Electron microscopy
  • Surface metrology
  • Absorption and emission spectroscopy
  • Electrical and solar testing


Advanced Imaging, Basement Engineering Science Building
Analytical, 107 Engineering Science Building
Cleanroom, 111 Engineering Science Building

Links and Resources

Technical Staff

Advanced Imaging:   Anthony Hmelo; James McBride
Analytical:                Dmitry Koktysh
Cleanroom:              Kurt Heinrich; Alice Leach; William Martinez


Name Role Phone Email Location
Sarah Ross
Core Manager
351B Featheringill/Jacobs Hall