Vanderbilt Institute of Nanoscale Science and Engineering (VINSE)

Overview of Services

VINSE provides access and training on state-of-the-art fabrication and characterization equipment. Full-time staff provide training, process assistance and tool troubleshooting.  Our new facilities include a cleanroom, analytical support core and advanced imaging suite. The cleanroom provides cutting-edge nanofabrication tools for the development of materials and integrated devices as well as microfluidic and nano-photonic systems. An analytical laboratory conveniently located adjacent to the cleanroom contains a comprehensive range of characterization tools. The imaging suite hosts a number of advanced imaging platforms.

Join VINSE

New user access request - click here

All VINSE users are required to complete two Vanderbilt's Environmental Health and Safety modules: Chemical Waste Training for Labs & Chemical and Physical Safety in the Lab.
Additional separate orientation sessions are required for access to the cleanroom and the analytical lab.

Services Offered

• Physical and chemical vapor deposition
• Focused ion beam
• Reactive ion etching and plasma treatment
• Wet chemical etching and cleaning
• Photolithography
• Electron beam lithography
• Soft lithography
• Photomask design and fabrication
• Thermal and oxygen sensitive processing
• Printing and assembly
• Device packaging
• Optical microscopy
• Electron microscopy
• Surface metrology
• Absorption and emission spectroscopy
• Electrical and solar testing

Location 

Advanced Imaging, Basement Engineering Science Building
Analytical, 107 Engineering Science Building
Cleanroom, 111 Engineering Science Building

Links and Resources

• VINSE
• List of Instrumentation
• User Fees
• Facility Tours

Technical Staff

Advanced Imaging:   Anthony Hmelo; James McBride
Analytical:                Dmitry Koktysh
Cleanroom:              Kurt Heinrich; Alice Leach; William Martinez

Contacts