Vanderbilt Institute of Nanoscale Science and Engineering (VINSE)

Overview of Services

VINSE provides access and training on state-of-the-art fabrication and characterization equipment. Full-time staff provide training, process assistance and tool troubleshooting.  Our new facilities include a cleanroom, analytical support core and advanced imaging suite. The cleanroom provides cutting-edge nanofabrication tools for the development of materials and integrated devices as well as microfluidic and nano-photonic systems. An analytical laboratory conveniently located adjacent to the cleanroom contains a comprehensive range of characterization tools. The imaging suite hosts a number of advanced imaging platforms.

Join VINSE

New user access request - click here

New users to Advanced Imaging will be contacted for tool training.
New users to Analytical or the Cleanroom will need to complete “Chemical and Physical Safety for Research Labs”.

Services Offered

• Physical and chemical vapor deposition
• Focused ion beam
• Reactive ion etching and plasma treatment
• Wet chemical etching and cleaning
• Photolithography
• Electron beam lithography
• Soft lithography
• Photomask design and fabrication
• Thermal and oxygen sensitive processing
• Printing and assembly
• Device packaging
• Optical microscopy
• Electron microscopy
• Surface metrology
• Absorption and emission spectroscopy
• Electrical and solar testing

Location 

Advanced Imaging, Basement Engineering Science Building
Analytical, 107 Engineering Science Building
Cleanroom, 111 Engineering Science Building

Links and Resources

• VINSE
• List of Instrumentation
• User Fees
• Facility Tours

Contacts